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Title:
LASER LIGHT IRRADIATION DEVICE AND LASER LIGHT IRRADIATION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/145610
Kind Code:
A1
Abstract:
A laser light irradiation device is provided with: a laser light source for generating laser light; a spatial light modulator that has a display unit for displaying a phase pattern and modulates the laser light generated by the laser light source according to the phase pattern displayed on the display unit; a beam diameter conversion mechanism that is disposed in the light path for the laser light between the laser light source and the spatial light modulator and increases or decreases the beam diameter for the laser light; a lens insertion and removal mechanism that has a lens capable of changing the laser light beam diameter and can insert the lens into the light path for the laser light between the laser light source and the spatial light modulator and can remove the lens from the light path; and a control unit for at least controlling the phase pattern displayed on the display unit. The control unit displays a phase pattern for correcting wavefront aberration generated by insertion and removal of the lens by the lens insertion and removal mechanism.

Inventors:
OKUMA JUNJI (JP)
Application Number:
PCT/JP2017/002351
Publication Date:
August 31, 2017
Filing Date:
January 24, 2017
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
B23K26/00; B23K26/064; H01L21/301; B23K26/53
Domestic Patent References:
WO2014041660A12014-03-20
Foreign References:
US20020190040A12002-12-19
JP2012250249A2012-12-20
JP2013132651A2013-07-08
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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