Title:
LASER-PLASMA ARC HYBRID WELDING PROCESS FOR LARGE ALUMINUM ALLOY CAVITY
Document Type and Number:
WIPO Patent Application WO/2020/063366
Kind Code:
A1
Abstract:
Disclosed is a laser-plasma arc hybrid welding process for a large aluminum alloy cavity, relating to an IC equipment manufacturing special welding technique, and the special welding technique is a technique of enabling the welding of a large aluminum alloy cavity by means of the precise control of welding parameters by a closed-loop control system and by taking laser-plasma arc as a hybrid heat source. The hybrid welding process uses a simulation member of a cavity on a target as a welding product, with the thickness of a cavity plate being 15-20 mm. Laser-plasma arc hybrid welding of such an aluminum alloy thick plate cavity product is performed by means of not grooving and one-time welding, so that the deformation of the product is controlled within 0.5 mm while a nearly flawless quality weld is obtained, and thus it is possible for a large aluminum alloy cavity in IC manufacturing equipment to change from a traditional casting process to a special precision welding process.
Inventors:
LI WENMING (CN)
MA GUANGYI (CN)
QIAO HONGCHAO (CN)
LI SHENGZHI (CN)
QIAO YONGPENG (CN)
MA GUANGYI (CN)
QIAO HONGCHAO (CN)
LI SHENGZHI (CN)
QIAO YONGPENG (CN)
Application Number:
PCT/CN2019/105672
Publication Date:
April 02, 2020
Filing Date:
September 12, 2019
Export Citation:
Assignee:
SHENYANG FORTUNE PREC EQUIPMENT CO LTD (CN)
International Classes:
B23K26/346; B23K26/348
Foreign References:
| CN109128508A | 2019-01-04 | |||
| CN101176954A | 2008-05-14 | |||
| CN101474727A | 2009-07-08 | |||
| CN105033460A | 2015-11-11 | |||
| JP2011218395A | 2011-11-04 | |||
| JP2010172911A | 2010-08-12 | |||
| KR100722385B1 | 2007-05-28 |
Attorney, Agent or Firm:
SHENYANG UPDATE INTELLECTUAL PROPERTY AGENCY (CN)
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