LASER PROCESSING APPARATUS, METHODS OF USE AND RELATED ARRANGEMENTS

Title:

LASER PROCESSING APPARATUS, METHODS OF USE AND RELATED ARRANGEMENTS

Document Type and Number:

WIPO Patent Application WO/2019/005530

Kind Code:

A3

Abstract:

A laser processing system can include a laser source configured to generate a beam of laser pulses at an average power of greater than 10 W and a turn mirror disposed in a path of the beam. The turn mirror can include a mirror configured to reflect a first portion of light within the laser pulses and transmit a second portion of the light within the laser pulses, and a mirror mount coupled to the mirror. The mirror mount is configured so as to not be present behind the mirror at a location where the mirror is irradiated with the laser pulses.

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Inventors:

YOSHINO FUMIYO (US)
NILSEN BRADY (US)
FERGUSON ROBERT (US)
LORD DAVID (US)
BUTTERFIELD WAYNE (US)

Application Number:

PCT/US2018/038190

Publication Date:

February 21, 2019

Filing Date:

June 19, 2018

Export Citation:

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Assignee:

ELECTRO SCIENT IND INC (US)

International Classes:

H01L21/67; B23K26/38

Foreign References:

US20150205094A1	2015-07-23
US20110108534A1	2011-05-12
US20120326058A1	2012-12-27
US20060164622A1	2006-07-27
JP2015190993A	2015-11-02

Attorney, Agent or Firm:

EATON, Kurt, M. (US)

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