Title:
LASER PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/239021
Kind Code:
A1
Abstract:
The present invention relates to a laser processing apparatus. The laser processing apparatus according to embodiments of the present invention comprises: a laser oscillator for outputting a laser beam; a pair of galvano mirrors for deflecting, according to processing data for an object to be processed, the laser beam outputted from the laser oscillator; an F-θ lens for radiating, towards the object to be processed, the laser beam deflected by the pair of galvano mirrors; and an image acquisition unit for acquiring an image of the object to be processed, via light incident through the F-θ lens, from the object to be processed, wherein the image acquisition unit is arranged on the movement path of the light incident through the F-θ lens, from the object to be processed, while being arranged to not cross the movement path of the laser beam radiated from the laser oscillator to the pair of galvano mirrors.
Inventors:
KWON GOO CHEOL (KR)
Application Number:
PCT/KR2023/003343
Publication Date:
December 14, 2023
Filing Date:
March 13, 2023
Export Citation:
Assignee:
K LAB CO LTD (KR)
International Classes:
B23K26/03; B23K26/06; G02B5/08; G02B13/00
Foreign References:
| KR20120007616A | 2012-01-25 | |||
| JP2021179608A | 2021-11-18 | |||
| JP2021186816A | 2021-12-13 | |||
| JPH10314967A | 1998-12-02 | |||
| JP2021186848A | 2021-12-13 |
Attorney, Agent or Firm:
KIM, Cheol (KR)
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