Title:
LASER PROCESSING DEVICE FLOW REGULATION DEVICE AND LASER PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/073561
Kind Code:
A1
Abstract:
A laser processing device (1) that processes a processing subject (100) having a plate surface by irradiating the processing subject with laser light (2), said laser processing device having: a transmission region (15) through which the laser light (2) passes and irradiates the processing subject (100) held in the laser processing device (1); a flow regulation part (20, 30) having a flow regulation surface (20A, 30A) extending from the end of the transmission region along the plate surface of the processing subject (100) toward the outside of the transmission region, with an interval between the flow regulation surface and the processing subject (100); a gas supply part (22) that, at a position away from the transmission region, supplies a gas to a gap between the transmission region (15) and one side of the flow regulation surface (20A, 30A); and a gas discharge part (24) that, at a position away from the transmission region, discharges gas from a gap between the processing subject (100) and the flow regulation surface (20A, 30A) on the other side from the one side, between which sides the transmission region (15) is sandwiched. Thus, a stable local gas atmosphere is formed.
Inventors:
ITO DAISUKE (JP)
SHIDA JUNICHI (JP)
SHIDA JUNICHI (JP)
Application Number:
PCT/JP2016/081580
Publication Date:
May 04, 2017
Filing Date:
October 25, 2016
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
B23K26/142; H01L21/20; H01L21/268
Foreign References:
| US20040238504A1 | 2004-12-02 | |||
| JP2002210582A | 2002-07-30 | |||
| JP2002178174A | 2002-06-25 | |||
| JP2002009435A | 2002-01-11 | |||
| JPS52114491U | 1977-08-31 | |||
| JPH01261292A | 1989-10-18 | |||
| JPH07503904A | 1995-04-27 | |||
| JP2016087639A | 2016-05-23 |
Attorney, Agent or Firm:
YOKOI Koki (JP)
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