Title:
LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/024218
Kind Code:
A1
Abstract:
A laser processing device (1) is provided with a laser light source (10), a spatial light modulator (20), a control section (22), and a light collection optical system (30). The spatial light modulator (20) inputs the laser light outputted from the laser light source (10), presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section (22) causes part of the phase-modulated laser light (incident light) to be collected as laser light (contribution light) having constant energy not less than a predetermined threshold (X) at a light collecting position present in a processing area. Meanwhile, the control section (22) causes laser light (unwanted light) other than the contribution light collected at the light collecting position existing in the processing area to be diffused and collected as a plurality of laser light (non-contribution light) beams having energy less than the predetermined threshold (X) at a light collecting position present in a non-processing area.
Inventors:
MATSUMOTO NAOYA (JP)
INOUE TAKASHI (JP)
FUKUCHI NORIHIRO (JP)
ITO HARUYASU (JP)
INOUE TAKASHI (JP)
FUKUCHI NORIHIRO (JP)
ITO HARUYASU (JP)
Application Number:
PCT/JP2009/064725
Publication Date:
March 04, 2010
Filing Date:
August 24, 2009
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
MATSUMOTO NAOYA (JP)
INOUE TAKASHI (JP)
FUKUCHI NORIHIRO (JP)
ITO HARUYASU (JP)
MATSUMOTO NAOYA (JP)
INOUE TAKASHI (JP)
FUKUCHI NORIHIRO (JP)
ITO HARUYASU (JP)
International Classes:
B23K26/00; B23K26/06; B23K26/067; B23K26/073; G02F1/061
Foreign References:
| JP2006119427A | 2006-05-11 | |||
| JP2004122233A | 2004-04-22 | |||
| JP2001272636A | 2001-10-05 | |||
| JP2723798B2 | 1998-03-09 | |||
| JP2723798B2 | 1998-03-09 |
Other References:
R. W. GERCHBERG; W. O. SAXTON: "A practical algorithm for the determination of phase from image and diffraction plane pictures", OPTIK, vol. 35, 1972, pages 237 - 246
JORGEN BENGTSSON: "Kinoform design with an optimal-rotation-angle method", APPLIED OPTICS, vol. 33, no. 29, 1994, pages 6879 - 6884
HIDETOMO TAKAHASHI; SATOSHI HASEGAWA; YOSHIO HAYASAKI: "Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial frequency response of liquid crystal spatial light modulator", APPLIED OPTICS, vol. 46, no. 23, pages 5917 - 5923
See also references of EP 2335862A4
JORGEN BENGTSSON: "Kinoform design with an optimal-rotation-angle method", APPLIED OPTICS, vol. 33, no. 29, 1994, pages 6879 - 6884
HIDETOMO TAKAHASHI; SATOSHI HASEGAWA; YOSHIO HAYASAKI: "Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial frequency response of liquid crystal spatial light modulator", APPLIED OPTICS, vol. 46, no. 23, pages 5917 - 5923
See also references of EP 2335862A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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