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Title:
LASER PROCESSING DEVICE, LASER PROCESSING SYSTEM, AND LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/198512
Kind Code:
A1
Abstract:
A laser processing device provided with: a height measurement unit which measures a vertical direction position of an irradiating point of a processing laser beam of light on an upper surface of a substrate; and a control unit which controls the vertical direction position of a light focusing unit on the basis of the vertical direction position of the irradiating point, while causing the irradiating point to be moved over a plurality of separation planned lines on the upper surface of the substrate. The height measurement unit includes a coaxial laser displacement meter and a separate-axis laser displacement meter. The control unit, while one of said substrate is being processed by means of the processing laser beam of light, controls the vertical direction position of the light focusing unit using only one of the coaxial laser displacement meter and the separate-axis laser displacement meter for each of the separation planned lines, and switches the laser displacement meter used for controlling the vertical direction position of the light focusing unit between the coaxial laser displacement meter and the separate-axis laser displacement meter.

Inventors:
MORI, Hirotoshi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
KAWAGUCHI, Yoshihiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
TANOUE, Hayato (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
HISANO, Kazuya (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2019/013292
Publication Date:
October 17, 2019
Filing Date:
March 27, 2019
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
H01L21/301; B23K26/03; B23K26/364; B23K26/53; G01B11/00
Domestic Patent References:
WO2016121685A12016-08-04
WO2004105110A12004-12-02
Foreign References:
JP2009140958A2009-06-25
JP2006278624A2006-10-12
JP2012059907A2012-03-22
JP2009511279A2009-03-19
JPH0357910A1991-03-13
Attorney, Agent or Firm:
ITOH, Tadashige et al. (16th Floor, Marunouchi MY PLAZA 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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