Title:
LASER PROCESSING METHOD USING INCLINATION ANGLE OF LASER BEAM
Document Type and Number:
WIPO Patent Application WO/2017/135543
Kind Code:
A1
Abstract:
Disclosed is a laser processing method using the inclination angle of a laser beam. The disclosed laser processing method is to remove an edge portion of a workpiece loaded on a stage by irradiating the laser beam to the edge portion. The method comprises the steps of: passing the laser beam through a focusing lens; and irradiating the edge of the workpiece with a tilted beam including an outer surface inclined with respect to the central axis of the focusing lens among the laser beams having passed through the focusing lens. The edge portion of the workpiece is processed to be oblique so as to correspond to the outer surface of the inclined beam.
Inventors:
KIM BYOUNG CHEOL (KR)
LEE JUNG YONG (KR)
CHANG EUI SOON (KR)
GONG TAE WON (KR)
LEE JUNG YONG (KR)
CHANG EUI SOON (KR)
GONG TAE WON (KR)
Application Number:
PCT/KR2016/010233
Publication Date:
August 10, 2017
Filing Date:
September 12, 2016
Export Citation:
Assignee:
EO TECHNICS CO LTD (KR)
International Classes:
B23K26/36; B23K26/06; B23K26/064; B23K26/08; B23K26/38; B23K101/42
Domestic Patent References:
| WO2012091316A2 | 2012-07-05 |
Foreign References:
| KR20120012001A | 2012-02-09 | |||
| KR20070043708A | 2007-04-25 | |||
| KR20130126287A | 2013-11-20 | |||
| KR20130138575A | 2013-12-19 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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