LASER PROCESSING METHOD - HAMAMATSU PHOTONICS K.K.

Title:

LASER PROCESSING METHOD

Document Type and Number:

WIPO Patent Application WO/2008/041539

Kind Code:

A1

Abstract:

A modified region is precisely formed at a desired position on the laser irradiation surface of a processing object. Upon trace recording, when an average difference (γ) has a value exceeding a predetermined threshold value, a particle zone (Z) is determined, including a line zone (S) where the average difference (γ) exceeds the predetermined threshold value. Thus it is determined that particles are present on a line (5) along which cutting is to be carried out and that measuring laser light is reflected diffusely by the particles. In the line zone along which cutting is to carried out, a zone is then detected as the particle zone(Z), in which a control signal is affected by the presence of the particles. The control signal is then corrected in the particle zone (Z), thereby preventing a collective lens from moving more than required because the control signal includes an error due to the effect of the presence of the particles and making the focal point of processing laser light precisely trace the surface (3).

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Inventors:

ATSUMI, Kazuhiro (1126-1 Ichino-cho,Higashi-ku, Hamamatsu-sh, Shizuoka 58, 4358558, JP)
渥美一弘 (〒58 静岡県浜松市東区市野町１１２６番地の１浜松ホトニクス株式会社内 Shizuoka, 4358558, JP)
KUNO, Koji (1126-1 Ichino-cho,Higashi-ku, Hamamatsu-sh, Shizuoka 58, 4358558, JP)

Application Number:

JP2007/068515

Publication Date:

April 10, 2008

Filing Date:

September 25, 2007

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 4358558, JP)
ATSUMI, Kazuhiro (1126-1 Ichino-cho,Higashi-ku, Hamamatsu-sh, Shizuoka 58, 4358558, JP)
渥美一弘 (〒58 静岡県浜松市東区市野町１１２６番地の１浜松ホトニクス株式会社内 Shizuoka, 4358558, JP)

International Classes:

B23K26/38; B23K26/00; B23K26/04; B23K26/40; H01L21/301

Attorney, Agent or Firm:

HASEGAWA, Yoshiki et al. (SOEI PATENT AND LAW FIRM, Ginza First Bldg.10-6, Ginza 1-chom, Chuo-ku Tokyo 61, 1040061, JP)

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