Title:
LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/074058
Kind Code:
A1
Abstract:
The present invention is a laser processing method that forms a thermally denatured region inside a transparent member by concentration and irradiation with ultrashort pulse laser light. The ultrashort pulse laser light is constituted of a pulse train P2 wherein peak intensity changes periodically. The pulse train P2 includes, within a single period Ts wherein the peak intensity changes, a maximum pulse Pb1 where the peak intensity is a maximum, a minimum pulse Pb2 where the peak intensity is a minimum, and an intermediate pulse group Pb3 that is formed from a plurality of pulses between the maximum pulse Pb1 and the minimum pulse Pb2 and wherein the peak intensity gradually decreases moving from the maximum pulse Pb1 side to the minimum pulse Pb2 side.
Inventors:
MASUDA NORIAKI (JP)
MIURA KIYOTAKA (JP)
SHIMOTSUMA YASUHIKO (JP)
SAKAKURA MASAAKI (JP)
MIURA KIYOTAKA (JP)
SHIMOTSUMA YASUHIKO (JP)
SAKAKURA MASAAKI (JP)
Application Number:
PCT/JP2017/030239
Publication Date:
April 26, 2018
Filing Date:
August 24, 2017
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO (JP)
UNIV KYOTO (JP)
UNIV KYOTO (JP)
International Classes:
B23K26/0622; B23K26/00; B23K26/53; C03B23/203; C03C23/00
Domestic Patent References:
| WO2015095264A2 | 2015-06-25 |
Foreign References:
| JP2015098042A | 2015-05-28 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
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