Title:
LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/134868
Kind Code:
A1
Abstract:
A laser processing system is provided with the following: A. a wavelength variable laser device, which is a laser device for outputting pulse laser light, capable of varying the wavelength of the pulse laser light; B. an optical system for irradiating a workpiece with pulse laser light output by the wavelength variable laser device; C. a reference wavelength acquisition unit for acquiring a reference wavelength corresponding to photon absorption and in accordance with the material of the workpiece; D. a laser processing control unit, which is a control unit for controlling the wavelength variable laser device so as to execute preprocessing of the workpiece before the execution of main processing, for executing preprocessing for finding a wavelength at a plurality of wavelengths while varying the wavelength of the pulse laser light output by the wavelength variable laser device in a prescribed range that includes the reference wavelength; E. a processing state measuring instrument for measuring the processing state for each wavelength in the preprocessing for finding a wavelength, which is carried out with a plurality of wavelengths; and F. an optimal wavelength determining unit for determining an optimal wavelength for use in the main processing by evaluating the processing state for each wavelength.
Inventors:
KAKIZAKI KOUJI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2017/001346
Publication Date:
July 26, 2018
Filing Date:
January 17, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
B23K26/53; H01L21/301
Foreign References:
| JP2007165839A | 2007-06-28 | |||
| JP2004186200A | 2004-07-02 | |||
| JP2010158686A | 2010-07-22 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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