Title:
LASER SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/250298
Kind Code:
A1
Abstract:
In a laser system according to an aspect of the present disclosure, a beam shaping unit, a random phase plate, and collimating optics are arranged on an optical path between a solid-state laser apparatus and an excimer amplifier. A propagation direction of laser light entering the excimer amplifier is the Z-direction, a discharge direction of a pair of discharge electrodes is the V-direction, a direction orthogonal to the V-direction and the Z-direction is the H-direction, a shaping direction of the beam shaping unit corresponding to the V-direction is a first direction, and a shaping direction of the beam shaping unit corresponding to the H-direction is a second direction. The beam shaping unit enlarges the beam cross section of laser light so that an enlargement rate ratio defined by E2/E1 is greater than one, where E1 is the enlargement rate in the first direction and E2 is the enlargement rate in the second direction.
Inventors:
TAMARU YUKI (JP)
MIURA TAISUKE (JP)
MIURA TAISUKE (JP)
Application Number:
PCT/JP2019/023064
Publication Date:
December 17, 2020
Filing Date:
June 11, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2018138819A1 | 2018-08-02 | |||
| WO2016151827A1 | 2016-09-29 | |||
| WO2019012642A1 | 2019-01-17 |
Foreign References:
| JP2012204819A | 2012-10-22 | |||
| JPH0298919A | 1990-04-11 | |||
| US20180180487A1 | 2018-06-28 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Download PDF: