Title:
LASER-USE CHAMBER DEVICE, GAS LASER DEVICE, AND METHOD OF PRODUCING ELECTRICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/174571
Kind Code:
A1
Abstract:
This laser-use chamber device is provided with: a dielectric pipe; an inner electrode that extends along a longitudinal direction of the pipe and is arranged inside a through hole of the pipe; an outer electrode including a contact plate that extends along the longitudinal direction of the pipe and is in contact with an outer peripheral surface of the pipe, and a ladder part constituted by a plurality of bar members that have one end connected to the contact plate and that are lined up along the longitudinal direction of the contact plate; and a leaf spring that extends along the longitudinal direction of the pipe and presses the outer electrode against the pipe. The leaf spring includes a plurality of leaf spring pieces that are divided by slits that are cut out from an edge running along the longitudinal direction of the pipe; the leaf spring pieces each have a bending section bent along the edge, and may press the bar members at the edge side beyond the bending sections.
Inventors:
ISHII TAKUYA (JP)
ITO TAKASHI (JP)
KUJIRA RYOTA (JP)
ITO TAKASHI (JP)
KUJIRA RYOTA (JP)
Application Number:
PCT/JP2019/007263
Publication Date:
September 03, 2020
Filing Date:
February 26, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/038
Foreign References:
| JP2015018910A | 2015-01-29 | |||
| JP2000286622A | 2000-10-13 | |||
| JPS56131042U | 1981-10-05 | |||
| JPH10341053A | 1998-12-22 | |||
| JP2001168432A | 2001-06-22 | |||
| US5347531A | 1994-09-13 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
Download PDF: