Title:
LAYERED BODY AND INDICATOR
Document Type and Number:
WIPO Patent Application WO/2020/218078
Kind Code:
A1
Abstract:
(Problem) To provide a layered body and an indicator, wherein the sensitivity of a detection layer can be adjusted readily, the detection of the progression and end of processing is ensured, the detection that processing is being performed uniformly over the entirety of an object to be processed is straightforward, and the contamination by a contaminant arising concomitantly to these processings may be avoided. (Solution) The layered body includes a base material layer and a detection layer that changes in color tone by detecting at least one selected from the group consisting of plasma, ozone, UV ray, and a radical-containing gas. The detection layer is provided with a structure body having an interior space communicating with an open hole section on the surface thereof. Contained inside the interior space is a detection agent containing at least one species of detection component that changes in color tone by detecting at least one selected from the group consisting of plasma, ozone, UV ray, and radical-containing gas. In the layered body, the content of each metal atom is less than 5.0 ppm by mass, or, the detection component contains a dye compound containing no atoms other than carbon, hydrogen, oxygen, and nitrogen.
Inventors:
NISHI MASAYUKI (JP)
YAMAKAWA YU (JP)
TAKEOKA HIROAKI (JP)
MEMIDA YUHICHI (JP)
YAMAKAWA YU (JP)
TAKEOKA HIROAKI (JP)
MEMIDA YUHICHI (JP)
Application Number:
PCT/JP2020/016367
Publication Date:
October 29, 2020
Filing Date:
April 14, 2020
Export Citation:
Assignee:
SAKURA COLOR PROD CORP (JP)
International Classes:
G01N31/00; G01N31/22; H01L21/3065
Domestic Patent References:
| WO2018008586A1 | 2018-01-11 | |||
| WO2018128123A1 | 2018-07-12 | |||
| WO2015025699A1 | 2015-02-26 |
Foreign References:
| JP2009063593A | 2009-03-26 | |||
| JP3452067B2 | 2003-09-29 | |||
| JP2011132529A | 2011-07-07 | |||
| JP2019032312A | 2019-02-28 | |||
| JP2000146944A | 2000-05-26 | |||
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| JP2002541466A | 2002-12-03 | |||
| JP2012526270A | 2012-10-25 |
Other References:
UNEYAMA, KAZUHIRO: "Non-official translation: Visualization of treatment process by plasma indicator", NANOTECHJAPAN BULLETIN, vol. 10, no. 6, 27 December 2017 (2017-12-27)
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