Title:
LAYERED BODY, AND LAYERED BODY MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/085137
Kind Code:
A1
Abstract:
The present invention provides a layered body having: an insulating layer (A) that has a surface in which a trench is formed; a metal particulate layer (B) that is layered on the trench; and a metal plating layer (C) that is layered within the trench and on the metal particulate layer (B). The present invention also provides a layered body having a barrier metal plating layer (E) between the metal particulate layer (B) and the metal plating layer (C). The present invention further provides a layered body having a primer layer (D) between the insulating layer (A) and the metal particulate layer (B). These layered bodies can be manufactured according to a simple method without the use of large-scale vacuum equipment or similar, and allow a metal layer to be formed on a trench.
Inventors:
FURUTANI AKINORI (JP)
SHIRAKAMI JUN (JP)
FUKAZAWA NORIMASA (JP)
SHIRAKAMI JUN (JP)
FUKAZAWA NORIMASA (JP)
Application Number:
PCT/JP2019/040405
Publication Date:
April 30, 2020
Filing Date:
October 15, 2019
Export Citation:
Assignee:
DAINIPPON INK & CHEMICALS (JP)
International Classes:
B32B3/30; B32B15/04; C23C18/16; C23C28/00; C25D5/02; C25D5/56; H01L21/3205; H01L21/768; H01L23/522
Foreign References:
| JP2013067856A | 2013-04-18 | |||
| JP2001323381A | 2001-11-22 | |||
| US20110057316A1 | 2011-03-10 | |||
| US20060254504A1 | 2006-11-16 | |||
| JP2015220315A | 2015-12-07 |
Attorney, Agent or Firm:
OGAWA Shinji (JP)
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