Title:
LAYERED PRODUCT AND PROCESS FOR PRODUCING LAYERED PRODUCT
Document Type and Number:
WIPO Patent Application WO/2016/132681
Kind Code:
A1
Abstract:
A layered product which comprises a support layer and a metal oxide layer superposed in this order or comprises a support layer, a mixing layer, and a metal oxide layer superposed in this order, wherein the mixing layer has a film thickness larger than 0 nm but not larger than 5.0 nm.
Inventors:
TOMAI SHIGEKAZU (JP)
UEOKA YOSHIHIRO (JP)
SEKIYA TAKASHI (JP)
TSURUMA YUKI (JP)
KAWASHIMA EMI (JP)
TAKESHIMA MOTOHIRO (JP)
INOUE KAZUYOSHI (JP)
HAYASAKA HIROMI (JP)
UEOKA YOSHIHIRO (JP)
SEKIYA TAKASHI (JP)
TSURUMA YUKI (JP)
KAWASHIMA EMI (JP)
TAKESHIMA MOTOHIRO (JP)
INOUE KAZUYOSHI (JP)
HAYASAKA HIROMI (JP)
Application Number:
PCT/JP2016/000345
Publication Date:
August 25, 2016
Filing Date:
January 25, 2016
Export Citation:
Assignee:
IDEMITSU KOSAN CO (JP)
International Classes:
B32B9/00; C23C14/06; C23C16/40; H01L21/28; H01L21/285; H01L29/47; H01L29/861; H01L29/868; H01L29/872
Domestic Patent References:
| WO2013035472A1 | 2013-03-14 | |||
| WO2012137781A1 | 2012-10-11 |
Foreign References:
| JP2005108982A | 2005-04-21 | |||
| JP2004214434A | 2004-07-29 | |||
| JP2010073820A | 2010-04-02 | |||
| JP2014241404A | 2014-12-25 | |||
| JP2015227279A | 2015-12-17 | |||
| JPH1053867A | 1998-02-24 |
Attorney, Agent or Firm:
WATANABE, Kihei et al. (JP)
Kihei Watanabe (JP)
Kihei Watanabe (JP)
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