Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
LAYERED STRUCTURE BODY AND LAYERED STRUCTURE BODY PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/039010
Kind Code:
A1
Abstract:
The present invention provides a layered structure body comprising a crystalline substrate and a crystalline oxide film having a beta gallia structure with gallium as the main component, wherein the crystalline substrate has lithium tantalate as the main component. As a result, an inexpensive layered structure body having a thermally stable crystalline oxide film is provided.

More Like This:
WO/2017/204646METHOD FOR MANUFACTURING A PATTERNED MONOCRYSTALLINE FILM
JPH0753636[Title of the Invention] A method for producing a zinc oxide piezoelectric crystal thin film.
JP7349740Method for producing boron sheet crystals, thin films, and solutions using heterocyclic compounds
Inventors:
WATABE TAKENORI (JP)
HASHIGAMI HIROSHI (JP)
TANNO MASAYUKI (JP)
Application Number:
PCT/JP2020/022282
Publication Date:
March 04, 2021
Filing Date:
June 05, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
C30B29/16; C23C16/40; C30B25/18; H01L21/365; H01L21/368
Domestic Patent References:
WO2016152335A12016-09-29
Foreign References:
JP2016064961A2016-04-28
JP2017010966A2017-01-12
JP2015134717A2015-07-27
JP2014015366A2014-01-30
JP2014072463A2014-04-21
JP2014015366A2014-01-30
JP2015091740A2015-05-14
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: STEERING DEVICE

Next Patent: IMAGE CAPTURE DEVICE, PROCESSING DEVICE, DATA TRANSPORT SYSTEM, AND DATA TRANSPORT METHOD