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Patent Searching and Data


Title:
LEAK DETECTOR
Document Type and Number:
WIPO Patent Application WO/2012/066715
Kind Code:
A1
Abstract:
Provided is a leak detector with strong detection sensitivity and usability which allows commencing a leak test rapidly after commencing evacuating the probe without impairing a function of also having a rapid speed of reaction with helium gas. The leak detector comprises: a mass spectrometry tube (2) which senses a search gas; and a turbomolecular pump (3) further comprising a plurality of stator blades (34) and turbine blades (33) which are mounted on a rotating axle (32) in alternating stages, and wherein a drive source (35) is disposed which rotationally drives the rotating axis, within a housing (31). Within the housing, at a wall face (31a) which is opposite to the turbine blades (33a) which are located at the highest stage, an intake port (36) which communicates with the probe (TP) and a connection port (37) which is connected to the mass spectrometry tube are opened, said ports being mutually spaced apart from one another. A leak sensing is carried out with the intake port of the turbomolecular pump and the specimen connected via a connecting pipe, and the search gas drawn into the mass spectrometry tube from within the probe.

Inventors:
MATSUMOTO YOSHIKAZU (JP)
SETO NORIMASA (JP)
NAKAMURA DAISUKE (JP)
MAEDA AKIHIRO (JP)
Application Number:
PCT/JP2011/005491
Publication Date:
May 24, 2012
Filing Date:
September 29, 2011
Export Citation:
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Assignee:
ULVAC INC (JP)
MATSUMOTO YOSHIKAZU (JP)
SETO NORIMASA (JP)
NAKAMURA DAISUKE (JP)
MAEDA AKIHIRO (JP)
International Classes:
F04D19/04; G01M3/20
Foreign References:
JPH1090105A1998-04-10
JP2006517291A2006-07-20
JPS2655315B
Other References:
See also references of EP 2642266A4
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)
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Claims: