Title:
LEAK INSPECTION DEVICE AND LEAK INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/043535
Kind Code:
A1
Abstract:
A leak inspection device for inspecting leaks from a workpiece (W) by sealing a gas inside the workpiece or sucking the gas therefrom includes: a depressurizing device that reduces the pressure of the gas inside the workpiece; a pressurizing device that pressurizes the gas inside the workpiece; a temperature sensor that detects the temperature of the workpiece; a pressure sensor that detects the pressure of the gas inside the workpiece; and a controller. The controller calculates the saturation water vapor pressure at the same temperature as the temperature of the workpiece, controls the depressurizing device to thereby reduce the pressure of the gas inside the workpiece to the saturation water vapor pressure, sucks the water vapor that has vaporized inside the workpiece, controls the pressurizing device to thereby seal the gas inside the workpiece and pressurize the gas inside the workpiece until the temperature (To) of the workpiece detected by the temperature sensor reaches a predetermined temperature (T1). With this construction, it is possible to eliminate changes in workpiece temperature and residual water inside the workpiece, which become the causes of disturbance during leak inspection.
Inventors:
YAMAGUCHI TETSUYA (JP)
Application Number:
PCT/JP2011/072019
Publication Date:
April 05, 2012
Filing Date:
September 27, 2011
Export Citation:
Assignee:
TOYOTA MOTOR CO LTD (JP)
YAMAGUCHI TETSUYA (JP)
YAMAGUCHI TETSUYA (JP)
International Classes:
G01M3/26
Foreign References:
| JP2003065885A | 2003-03-05 | |||
| JP2004028778A | 2004-01-29 | |||
| JPH04188807A | 1992-07-07 |
Attorney, Agent or Firm:
YANO Juichiro (JP)
Juichiro Yano (JP)
Juichiro Yano (JP)
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