Title:
LEAKAGE DETECTION METHOD AND VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/132365
Kind Code:
A1
Abstract:
Disclosed is a leakage detection method with which leakage detection with respect to a large vacuum processing device in particular can be performed accurately, efficiently and in a short time by using a leakage detector. A leakage detector (6), which has a mass spectrometer pipe (61) that detects helium gas and has vacuum pumps (63, 65) that evacuate the interior of the mass spectrometer pipe, is connected to a vacuum processing device (1) by way of a connection pipe (7). The vacuum processing device (1) is provided with a chamber (11), a high-vacuum pump (2) and a fore pump (5) which is connected by way of discharge pipes (3, 4) to the discharge side of the high-vacuum pump and performs auxiliary discharge of the high-vacuum pump. Leakage detection of the vacuum processing device is performed by blowing helium gas from the outside of the vacuum processing device and performing detection by leading helium gas, which is drawn into the chamber from a leakage location of the vacuum processing device, to the mass spectrometer pipe. The connection pipe from the leakage detector is connected within a range of 10% or less of the total length of, from among the discharge pipes, the discharge pipe from the discharge side of the high-vacuum pump.
Inventors:
NAKAMURA, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中邨 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MATSUMOTO, Yoshikazu (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中邨 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
MATSUMOTO, Yoshikazu (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2011/001737
Publication Date:
October 27, 2011
Filing Date:
March 24, 2011
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
NAKAMURA, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中邨 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
NAKAMURA, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中邨 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
中島 豊昭 (〒43 神奈川県茅ヶ崎市萩園２５００株式会社アルバック内 Kanagawa, 〒2538543, JP)
International Classes:
G01M3/20
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (9th Fl, Saisho Bldg. 1-14 Nishi-Gotanda 8-chome, Shinagawa-k, Tokyo 31, 〒1410031, JP)
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