Title:
LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/005199
Kind Code:
A1
Abstract:
Provided are a leakage inspection device and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber (21). The leakage inspection device comprises a liquid supplying and pressurizing means (11) for supplying a probe liquid to the inside of the tested-body chamber (21) and pressurizing the probe liquid to a high pressure of 0.1 MPa or more, a vacuum exhausting means (22-b, 23-b), and a quadrupole mass spectrometer (34). The tested-body chamber (21) is evacuated, a probe liquid is supplied to the inside of the tested body and is pressurized to a pressure of 0.1 MPa or more, and the concentration of a probe medium leaking from the tested body and evaporating in a vacuum is measured by the quadrupole mass spectrometer (34), thereby measuring the flow rate of leakage from the tested body. It is possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously it is possible to perform a withstanding pressure test especially at high pressures ranging from 1 MPa up to 1 GPa under an atmospheric pressure of 0.1 MPa or more.
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Inventors:
YAMAMOTO, Setsuo (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
山本 節夫 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
KURISU, Hiroki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
栗巣 普揮 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
TAKADA, Naoki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
▲高▼田 直己 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
山本 節夫 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
KURISU, Hiroki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
栗巣 普揮 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
TAKADA, Naoki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
▲高▼田 直己 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
Application Number:
JP2011/065222
Publication Date:
January 12, 2012
Filing Date:
July 01, 2011
Export Citation:
Assignee:
Yamaguchi University (1677-1, Yoshida Yamaguchi-sh, Yamaguchi 11, 〒7538511, JP)
国立大学法人山口大学 (〒11 山口県山口市吉田１６７７－１ Yamaguchi, 〒7538511, JP)
Marunaka Co., Ltd. (224-1, Toyama Kitasaki-cho, Obu-sh, Aichi 01, 〒4740001, JP)
株式会社マルナカ (〒01 愛知県大府市北崎町遠山２２４－１ Aichi, 〒4740001, JP)
YAMAMOTO, Setsuo (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
山本 節夫 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
KURISU, Hiroki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
栗巣 普揮 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
国立大学法人山口大学 (〒11 山口県山口市吉田１６７７－１ Yamaguchi, 〒7538511, JP)
Marunaka Co., Ltd. (224-1, Toyama Kitasaki-cho, Obu-sh, Aichi 01, 〒4740001, JP)
株式会社マルナカ (〒01 愛知県大府市北崎町遠山２２４－１ Aichi, 〒4740001, JP)
YAMAMOTO, Setsuo (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
山本 節夫 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
KURISU, Hiroki (Yamaguchi University 16-1, Tokiwadai 2-chome, Ube-sh, Yamaguchi 11, 〒7558611, JP)
栗巣 普揮 (〒11 山口県宇部市常盤台２丁目１６－１ 国立大学法人山口大学工学部内 Yamaguchi, 〒7558611, JP)
International Classes:
G01M3/20
Attorney, Agent or Firm:
TOMISAKI, Motonari et al. (2nd Floor, Toranomon-yoshiara Bldg. 6-13, Nishishimbashi 1-chome, Minato-k, Tokyo 03, 〒1050003, JP)
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