Title:
LEARNING DEVICE, INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, LEARNING METHOD, AND PROCESSING CONDITIONS DETERMINATION METHOD
Document Type and Number:
WIPO Patent Application WO/2024/070233
Kind Code:
A1
Abstract:
This learning device includes: an experimental data acquisition unit that acquires a first processing amount indicating the difference in film thickness between before and after processing of a coating film, after the coating film has been processed by driving, under processing conditions including a fluctuating condition that fluctuates over time, a substrate processing device for processing the coating film by supplying a processing liquid to a substrate on which the coating film is formed; and a model generation unit that performs machine learning of training data including the fluctuating condition and the first processing amount corresponding to the processing conditions, and generates a learning model for inferring a second processing amount indicating the difference in film thickness between before and after processing of the coating film formed on the substrate prior to the coating film processing by the substrate processing device. The learning model includes a first convolutional neural network.
Inventors:
TOKUYAMA MASAHIRO (JP)
Application Number:
PCT/JP2023/028655
Publication Date:
April 04, 2024
Filing Date:
August 04, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/306; G06N20/00
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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