LED LIGHT SOURCE MODULE FOR LIGHT EXPOSURE, LED LIGHT SOURCE APPARATUS FOR LIGHT EXPOSURE, AND SYSTEM FOR MANAGING LED LIGHT SOURCE APPARATUS FOR LIGHT EXPOSURE

WIPO Patent Application WO/2013/058552

A1

The present invention provides a single light source module including a plurality of light source units using an LED (Light Emitting Diode) as a light source to be able to perform light exposure on objects to be light-exposed of various sizes and types such as semiconductor wafers, display panels, and the like, and on photoresists (PRs) having various characteristics with one light source. In addition, the present invention provides an apparatus and a management system capable of efficiently controlling and managing the single light source module, thereby providing an LED light source module for light exposure, an LED light source apparatus for light exposure, and a system for managing the LED light source apparatus for light exposure, whereby an object to be light-exposed can be accurately and quickly light-exposed by finely and simply adjusting the intensity of a light source for light exposure, and a malfunction can be quickly and easily corrected.

LEE JAE-KYUNG (KR)
OH SO-YOUNG (KR)
SHIM HYUN-CHANG (KR)
YUN DONG-KIL (KR)
KIM DONG-YOUNG (KR)
LIM SANG-KYUN (KR)
JUNG SEONG-YUNG (KR)
SEO JAE-IN (KR)
PARK JONG-SIK (KR)
CHOI HWAN-YONG (KR)
SHIN MI-SUN (KR)
KIM HAN-YONG (KR)

PCT/KR2012/008498

April 25, 2013

October 17, 2012

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INFITECH CO LTD (KR)

F21S2/00; F21V8/00; G03F7/20; F21Y101/02

JP2007194583A	2007-08-02
JP2007273456A	2007-10-18
KR20110058501A	2011-06-01

AHN, Sei-young (KR)
안세영 (KR)

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