Title:
LENS CONTROL APPARATUS OF TEM FOR EASILY OBTAINING PED PATTERN
Document Type and Number:
WIPO Patent Application WO/2011/081463
Kind Code:
A2
Abstract:
The present invention relates to a lens control apparatus of a transmission electron microscope (TEM) for easily obtaining a PED pattern, which is a lens control apparatus of a TEM that includes: a plurality of electron lenses; and a lens controller which controls a characteristic of power applied to a plurality of alignment coils attached to each electron lens. The lens control apparatus comprises: (A) an electron lens controller which controls a characteristic of power applied to the electron lenses; and (B) an alignment coil controller which controls a current value and a frequency value of power applied to the alignment coils through a power characteristic alignment unit that is connected to the alignment coils. By applying the apparatus of the present invention, it is possible to precisely control a rotational angle and the rotary speed of an electron beam and to display the result of control in the TEM. Thus, a three-dimensional structure of a material can be interpreted in a quick and correct manner once the sample is mounted.
Inventors:
JUNG JONG-MAN
KIM YOUN-JOONG
KIM YOUN-JOONG
Application Number:
PCT/KR2010/009529
Publication Date:
July 07, 2011
Filing Date:
December 29, 2010
Export Citation:
Assignee:
KOREA BASIC SCIENCE INST
JUNG JONG-MAN
KIM YOUN-JOONG
JUNG JONG-MAN
KIM YOUN-JOONG
International Classes:
H01J37/26
Foreign References:
| JPH11250843A | 1999-09-17 | |||
| JPH06132002A | 1994-05-13 | |||
| JP2006179504A | 2006-07-06 | |||
| JP2006059513A | 2006-03-02 |
Attorney, Agent or Firm:
KIM, WONJOON (KR)
김원준 (KR)
김원준 (KR)
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