Title:
LEVELING APPARATUS, COATING FILM MANUFACTURING APPARATUS PROVIDED WITH SAME, AND COATING FILM MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/155299
Kind Code:
A1
Abstract:
Disclosed is a leveling apparatus (10A) which is provided with: a conveyer which, while supporting the lower surface of a substrate (100), transfers the supported substrate (100) in the transfer direction, said substrate having a coating film material-containing solution applied to the upper surface; and a vibration applying unit (20A), which performs leveling of the solution applied to the substrate (100) by applying vibration to the substrate (100) moving in the transfer direction on a conveyer transfer path (11) defined by the conveyer.
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Inventors:
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
KOHTOKU, Yukihide (())
塩崎 唯史 (())
KOHTOKU, Yukihide (())
Application Number:
JP2011/061502
Publication Date:
December 15, 2011
Filing Date:
May 19, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SHIOZAKI, Tadashi (())
塩崎 唯史 (())
International Classes:
B05C11/08; B05C9/12; B05D3/12
Attorney, Agent or Firm:
Fukami Patent Office, p.c. (Nakanoshima Central Tower, 2-7 Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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Claims: