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Patent Searching and Data


Title:
LEVITATION UNIT AND CONTACTLESS SUPPORT DEVICE WITH THE SAME
Document Type and Number:
WIPO Patent Application WO/2010/026820
Kind Code:
A1
Abstract:
A levitation unit having a rocking mechanism, wherein a rockable body is less susceptible to be unexpectedly tilted by the weight thereof, so that damage to a workpiece is suppressed. A rocking mechanism is configured such that a spherical section (35) of a support body (30) is housed in a spherical bearing section (28a) of a body (20), and the body (20) is rockably supported by the support body (30).  In the body (20), there are provided an O-ring (29) making contact with the spherical section (35), and also a closed space (K1) sealed by the O-ring (29).  The rocking mechanism is provided with a pressurizing port (41) and an inner pressure adjusting path (42) such that the pressurizing port (41) can supply pressurized air to the closed space (K1).  When the support body (30) is in a fixed state, if the pressure in the closed space (K1) is increased by supply of the pressurized air, the increase in the inner pressure lifts up the body (20) relative to the support body (30).  This increases frictional resistance between the spherical section (35) and the spherical bearing section (28a) to suppress a tilt of the body (20) due to the weight thereof.

Inventors:
ITOH, Hidekazu (250 Ouji 2-chome, Komaki-sh, Aichi 51, 〒4858551, JP)
伊藤 秀和 (〒51 愛知県小牧市応時二丁目250番地 シーケーディ株式会社内 Aichi, 〒4858551, JP)
Application Number:
JP2009/061085
Publication Date:
March 11, 2010
Filing Date:
June 18, 2009
Export Citation:
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Assignee:
CKD CORPORATION (250Ouji 2-chome, Komaki-shi Aichi, 51, 〒4858551, JP)
シーケーディ株式会社 (〒51 愛知県小牧市応時二丁目250番地 Aichi, 〒4858551, JP)
ITOH, Hidekazu (250 Ouji 2-chome, Komaki-sh, Aichi 51, 〒4858551, JP)
International Classes:
F16C32/06; B65G49/06; F16C11/06; H01L21/677
Domestic Patent References:
WO2005049287A1
Foreign References:
JP2006179849A
JPH05318368A
JP2006319309A
JP2008207947A
Attorney, Agent or Firm:
YAMADA, Tsuyoshi (Daiichi Hasegawa Bldg.6F, 13-24Meieki 3-chome,Nakamura-ku,Nagoya-sh, Aichi 02, 〒4500002, JP)
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