Title:
LIFT DEVICE AND METHOD FOR USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/244362
Kind Code:
A1
Abstract:
[Problem] To achieve an increase in size and densification of a receptor substrate and shorten the tact time in a LIFT device while maintaining a high accuracy of the LIFT position. [Solution] A LIFT device is constructed with stage groups that move while holding a donor substrate with a LIFT sample mounted thereon and/or a beam shaping optical system and a reduction projection optical system, and a stage group for supporting a receptor substrate that is a LIFT destination, formed on separate surface plates. Thereby, the LIFT device minimizes the vibration accompanying relative movement of each substrate with respect to laser light and anomalies in the accuracy of the synchronization position for the stages used for the movement.
Inventors:
YAMAOKA HIROSHI (JP)
NAKADA SATOKI (JP)
OZAWA SHUSAKU (JP)
NAKADA SATOKI (JP)
OZAWA SHUSAKU (JP)
Application Number:
PCT/JP2018/024113
Publication Date:
December 26, 2019
Filing Date:
June 26, 2018
Export Citation:
Assignee:
MARUBUN CO LTD (JP)
International Classes:
H05B33/10; B23K26/57; G03F7/20; H01L21/02; H01L51/50
Foreign References:
| JP2009199856A | 2009-09-03 | |||
| JP2006175840A | 2006-07-06 | |||
| JP2003318372A | 2003-11-07 | |||
| US20140333911A1 | 2014-11-13 | |||
| US20140132751A1 | 2014-05-15 | |||
| KR20130078141A | 2013-07-10 | |||
| KR20100062595A | 2010-06-10 | |||
| KR20070107528A | 2007-11-07 |
Attorney, Agent or Firm:
SAWADA Kazunori (JP)
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