Title:
LIFT PIN ASSEMBLY AND SUBSTRATE PROCESSING DEVICE INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2022/169125
Kind Code:
A1
Abstract:
Provided is a lift pin assembly. In an embodiment, the lift pin assembly may comprise: a driving member; a horizontal bar that is raised and lowered vertically by the driving member; at least one pin support member which moves vertically according to the raising and lowering of the horizontal bar and in which lift pins are installed; and a guide member that guides the movement of the pin support member. The pin support member may include: a lift hoop in which the lift pins are installed; a shaft for supporting the lift hoop; a bellows provided surrounding the shaft; and a shaft ring provided on the outer circumferential surface of the shaft so as to prevent a gap from forming between the shaft and the bellows.
Inventors:
SIM KWANG BO (KR)
LEE SANG YEOL (KR)
KIM JIN WOONG (KR)
YU SEUNG YE (KR)
KO EUN SEO (KR)
LEE SANG YEOL (KR)
KIM JIN WOONG (KR)
YU SEUNG YE (KR)
KO EUN SEO (KR)
Application Number:
PCT/KR2022/000468
Publication Date:
August 11, 2022
Filing Date:
January 11, 2022
Export Citation:
Assignee:
PSK INC (KR)
International Classes:
H01L21/687; G03F7/20; G03F7/42; H01J37/32; H01L21/67
Foreign References:
| KR20080114151A | 2008-12-31 | |||
| KR20090048724A | 2009-05-15 | |||
| KR20080089791A | 2008-10-08 | |||
| JP2002242919A | 2002-08-28 | |||
| KR20040022530A | 2004-03-16 |
Attorney, Agent or Firm:
KWON, Hyuk-Soo et al. (KR)
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