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Title:
LIGHT-ABSORBING POLYMER, COMPOSITION FORMING LIGHT-ABSORBING COATINGS, LIGHT-ABSORBING COATINGS, AND ANTIREFLECTION COATING MADE BY USING THE SAME
Document Type and Number:
WIPO Patent Application WO/1998/055521
Kind Code:
A1
Abstract:
A light-absorbing polymer which contains a light-absorbing coloring matter chemically bonded thereto, has high absorptivity against light rays having specific wavelengths, is excellent in the adhesion to a substrate and the ability to form a thin film, is independent from a resist, and is soluble in solvents for photoresists but becomes insoluble therein through baking; a composition containing this polymer and forming light-absorbing coatings; and light-absorbing coatings (such as antireflection coating) made from the composition. The above polymer is a copolymer at least comprising repeating units derived from a monomer having a keto group and a divalent group (preferably methylene) on the side chain and repeating units derived from a monomer which has an organic chromophore bonded to the backbone chain either directly or through a connecting group and absorbs light rays having specific wavelengths. The light-absorbing coatings (such as antireflection coating) can be formed by dissolving the polymer in a solvent selected from among alcohols, aromatic hydrocarbons, ketones, esters and so on, applying the resulting solution to a wafer, and baking the resulting wafer. Further, a fine resist pattern free from the influence of standing waves can be produced by applying a chemically amplifiable resist on the light-absorbing coating formed above, exposing the resulting laminate to far-ultraviolet rays, and developing it.

Inventors:
Kang, Wen-bing (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Padmanaban, Munirathna (Clariant Corporation, 70 Meister Avenue Somerville, NJ, 08876, US)
Tanaka, Hatsuyuki (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Kimura, Ken (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Kudo, Takanori (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Pawlowski, Georg (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Application Number:
PCT/JP1998/002333
Publication Date:
December 10, 1998
Filing Date:
May 27, 1998
Export Citation:
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Assignee:
CLARIANT INTERNATIONAL LTD. (Rothausstrasse 61, Muttenz 1, CH-4132, CH)
Kang, Wen-bing (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Padmanaban, Munirathna (Clariant Corporation, 70 Meister Avenue Somerville, NJ, 08876, US)
Tanaka, Hatsuyuki (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Kimura, Ken (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Kudo, Takanori (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
Pawlowski, Georg (Clariant K. K, 3810 Chihama, Daitoch, Ogasa-gun Shizuoka, 437-1496, JP)
International Classes:
G03F7/11; C08F212/32; C08F216/36; C08F220/18; C08F220/28; C08F220/36; C08F220/54; C08F226/06; C08F246/00; C09D4/00; G03F7/09; (IPC1-7): C08F246/00; C08F212/02; C08F216/36; C08F220/10; C08F220/26; C08F220/54; C08F226/06; G03F7/11
Foreign References:
JPH07126536A
JPS58103512A
JPS4939687A
JPS53107835A
JPH0534647A
JPH06118656A
JPH1090908A
Other References:
See also references of EP 0916683A1
Attorney, Agent or Firm:
Kanao, Hiroki (Mutsumi Int. Patent Bureau, Bandai Building 10-14, Kandaawajicho 2-chom, Chiyoda-ku Tokyo, 101-0063, JP)
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