LIGHT-ABSORBING POLYMER, METHOD FOR SYNTHESIZING THE SAME, AND FILM-FORMING COMPOSITION AND ANTIREFLECTION FILM PREPARED USING SAID POLYMER

Title:

LIGHT-ABSORBING POLYMER, METHOD FOR SYNTHESIZING THE SAME, AND FILM-FORMING COMPOSITION AND ANTIREFLECTION FILM PREPARED USING SAID POLYMER

Document Type and Number:

WIPO Patent Application WO/1998/012238

Kind Code:

A1

Abstract:

A light-absorbing polymer comprising an organic chromophore reaction-bonded through a methylene or alkylene group to the carboxyl groups of a copolymer comprising repeating units having a dicarboxylic acid or carboxylic anhydride group on its backbone. In the light-absorbing polymer, the remaining carboxyl groups may be amidated and/or imidated with an aromatic compound having a reactive amino group. An antireflection film which is insoluble in a resist solvent and has good step coverage can be prepared from the light-absorbing polymer by dissolving the same, optionally together with an aromatic compound having a reactive amino group for improving properties, in the same solvent as the resist solvent, coating a substrate with the solution, and baking the coating. Coating of the antireflection film with a photoresist followed by irradiation with a radiation, such as a far-ultraviolet radiation, can provide a high-resolution resist image which is not affected by a standing wave in the preparation of an integrated circuit device.

Inventors:

KANG WEN-BING (JP)
TOKIDA AKIHIKO (JP)
ARAMAKI KAYO (JP)
TANAKA HATSUYUKI (JP)
KIMURA KEN (JP)

Application Number:

PCT/JP1997/003255

Publication Date:

March 26, 1998

Filing Date:

September 16, 1997

Export Citation:

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Assignee:

CLARIANT INT LTD (CH)
KANG WEN BING (JP)
TOKIDA AKIHIKO (JP)
ARAMAKI KAYO (JP)
TANAKA HATSUYUKI (JP)
KIMURA KEN (JP)

International Classes:

C08F8/30; C08F8/34; C09D5/32; G03F7/09; (IPC1-7): C08F8/14; C08F8/32; C08F216/00; C08F222/00; C08L29/00; C08L35/00; C09D5/00; C09D129/00; C09D135/00; G03F7/11

Foreign References:

JPH0673124A	1994-03-15
JPH05320227A	1993-12-03
JPS63314205A	1988-12-22
JPS6397601A	1988-04-28

Other References: