Title:
LIGHT ALIGNMENT CONTROL METHOD AND LIGHT ALIGNMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/001298
Kind Code:
A1
Abstract:
Provided are a light alignment control method and a light alignment device. The light alignment control method acquires a dynamically weighted light polarizing axle angle error of a substrate (200) by detecting a run-out value of a motion platform (130) with respect to a polarizing lighting device (110), to further control a rotation angle of a rotation platform (120) which drives the substrate (200) to rotate, thereby effectively improving the control accuracy of the light polarizing axle angle during the light alignment process, ensuring the accuracy of an alignment angle formed in an alignment film.
Inventors:
ZHOU CHANG (CN)
LUO WEN (CN)
ZHU SHUCUN (CN)
LUO WEN (CN)
ZHU SHUCUN (CN)
Application Number:
PCT/CN2017/090747
Publication Date:
January 04, 2018
Filing Date:
June 29, 2017
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO LTD (CN)
International Classes:
G02F1/1337
Foreign References:
| CN104296874A | 2015-01-21 | |||
| CN104390586A | 2015-03-04 | |||
| CN103941413A | 2014-07-23 | |||
| JP2003141665A | 2003-05-16 | |||
| JP2005227019A | 2005-08-25 |
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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