Title:
LIGHT BEAM PARALLELISM MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/108263
Kind Code:
A1
Abstract:
Provided is a light beam parallelism measuring device that is able to measure the parallelism of a light beam radiated from an incoherent light source, with few measurements. The light beam parallelism measuring device (1) has: a lens section (20), which forms an image of the light components contained in a light beam (9) at a location distant from an optical axis, K, by a distance of only L according to the angle of incidence, θ, with respect to the optical axis, K; and a two-dimensional detector (22), which detects the image formation position, P, of the light beam (9). The light beam parallelism measuring device (1) is equipped with an analyzer (12) that converts the distance, L, from the optical axis, K, to the image formation position, P, to the angle of incidence, θ, and which outputs the distribution of the angles of incidence of the light components contained in the light beam (9).
Inventors:
SAKAI, Masahiro (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
酒井 雅寛 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
KAWANABE, Yasufumi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
川鍋 保文 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
YAMADA, Kazuyoshi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
酒井 雅寛 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
KAWANABE, Yasufumi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
川鍋 保文 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
YAMADA, Kazuyoshi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
Application Number:
JP2011/001213
Publication Date:
September 09, 2011
Filing Date:
March 02, 2011
Export Citation:
Assignee:
IWASAKI ELECTRIC CO., LTD. (1-4-16, Nihonbashi-bakurocho Chuo-k, Tokyo 02, 〒1030002, JP)
岩崎電気株式会社 (〒02 東京都中央区日本橋馬喰町一丁目４－１６ Tokyo, 〒1030002, JP)
GENESIA CORPORATION (3-38-4, Shimo-Renjaku Mitaka-sh, Tokyo 13, 〒1810013, JP)
株式会社ジェネシア (〒13 東京都三鷹市下連雀３丁目３８番４号 Tokyo, 〒1810013, JP)
SAKAI, Masahiro (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
酒井 雅寛 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
KAWANABE, Yasufumi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
岩崎電気株式会社 (〒02 東京都中央区日本橋馬喰町一丁目４－１６ Tokyo, 〒1030002, JP)
GENESIA CORPORATION (3-38-4, Shimo-Renjaku Mitaka-sh, Tokyo 13, 〒1810013, JP)
株式会社ジェネシア (〒13 東京都三鷹市下連雀３丁目３８番４号 Tokyo, 〒1810013, JP)
SAKAI, Masahiro (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
酒井 雅寛 (〒05 埼玉県行田市壱里山町１－１ 岩崎電気株式会社 埼玉製作所内 Saitama, 〒3618505, JP)
KAWANABE, Yasufumi (LTD. Saitama Plant 1-1 Ichiriyama-cho, Gyoda Cit, Saitama 05, 〒3618505, JP)
International Classes:
G01M11/00; G01B11/26; G01J1/00; G01J1/02; H01L31/04
Attorney, Agent or Firm:
KUSHIBUCHI & ASSOCIATES (Sonic-City Bldg. 18F, 1-7-5 Sakuragi-cho, Omiya-ku, Saitama-sh, Saitama 69, 〒3308669, JP)
Claims:
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