Title:
LIGHT CONDENSING OPTICAL SYSTEM, LASER PROCESSING METHOD AND APPARATUS, AND METHOD OF MANUFACTURING FRAGILE MATERIAL
Document Type and Number:
WIPO Patent Application WO/2008/069099
Kind Code:
A1
Abstract:
It is an object to provide a light condensing optical system that does not cause problems such as the declining of the intensity of a condensed light spot and the discontinuing of an intensity distribution before and behind a focus, and that has a small condensed light spot size and a long focusing depth. A light condensing optical system, in which laser light generated from a laser light source is condensed at a desired focal distance, is designed to satisfy the following equations (a)-(d) and generates third order and fifth order spherical aberrations: (a) |Z8|≥0.1λ or |Z15|≥0.05λ, (b) Z8/Z15≥3 or Z8/Z15<1, (c) |Z8|<1.4λ, (d) |Z15|<0.5λ where λ is a wavelength, Z8 is an eighth coefficient of Zernike fringe polynomial coefficients of a spherical aberration and corresponds to a third order spherical aberration, and Z15 is a fifteenth coefficient of Zernike fringe polynomial coefficients of a spherical aberration and corresponds to a fifth order spherical aberration.
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Inventors:
WATATANI, Kenichi (Ltd. 1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
綿谷研一 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
FUSE, Keiji (Ltd. 1-3 Shimaya 1-chome, Konohana-ku, Osaka-sh, Osaka 24, 5540024, JP)
綿谷研一 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
FUSE, Keiji (Ltd. 1-3 Shimaya 1-chome, Konohana-ku, Osaka-sh, Osaka 24, 5540024, JP)
Application Number:
JP2007/073079
Publication Date:
June 12, 2008
Filing Date:
November 29, 2007
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 5410041, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
SUMITOMO ELECTRIC HARDMETAL CORP. (1-1 Koyakita 1-chome, Itami-shi Hyogo, 16, 6640016, JP)
住友電工ハードメタル株式会社 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 Hyogo, 6640016, JP)
WATATANI, Kenichi (Ltd. 1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
SUMITOMO ELECTRIC HARDMETAL CORP. (1-1 Koyakita 1-chome, Itami-shi Hyogo, 16, 6640016, JP)
住友電工ハードメタル株式会社 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 Hyogo, 6640016, JP)
WATATANI, Kenichi (Ltd. 1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
International Classes:
B23K26/08; B23K26/00; B23K26/40; B28D5/00; B23K26/08; B23K26/00; B28D5/00
Attorney, Agent or Firm:
SunCrest Patent and Trademark Attorneys (2-2 Kumoidori 4-chome, Chuo-ku Kobe-sh, Hyogo 96, 6510096, JP)
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