Title:
LIGHT DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/021411
Kind Code:
A1
Abstract:
This light detection device comprises: a semiconductor substrate; a plurality of avalanche photodiodes arranged in a matrix on the semiconductor substrate and each having a light reception region; and a plurality of through electrodes each electrically connected to corresponding light reception regions. The through electrode is arranged in each region surrounded by four adjacent avalanche photodiodes among the plurality of avalanche photodiodes. As viewed from a direction orthogonal to a first principal surface of the semiconductor substrate, each light reception region has a polygonal shape including: a pair of first sides that oppose one another in the row direction and extend in the column direction; and four second sides that respectively oppose the four through electrodes surrounding the light reception region, and that each extend in a direction intersecting with the row direction and the column direction. The length of the first side is shorter than the length of the second side.
Inventors:
ISHIDA ATSUSHI (JP)
NAGANO TERUMASA (JP)
BABA TAKASHI (JP)
NAGANO TERUMASA (JP)
BABA TAKASHI (JP)
Application Number:
PCT/JP2017/027055
Publication Date:
February 01, 2018
Filing Date:
July 26, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L31/107; H01L27/146
Domestic Patent References:
| WO2008004547A1 | 2008-01-10 |
Foreign References:
| JP2016029738A | 2016-03-03 | |||
| JP2010153603A | 2010-07-08 | |||
| US20110272561A1 | 2011-11-10 |
Other References:
See also references of EP 3493275A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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