Title:
LIGHT DETECTOR
Document Type and Number:
WIPO Patent Application WO/2018/110310
Kind Code:
A1
Abstract:
A light detector comprising a substrate and a membrane body supported upon the surface of the substrate such that a gap is formed between same and the surface of the substrate. The membrane body has: a first wiring layer and a second wiring layer that face each other via a gap extending along a line; a resistance layer electrically connected to both the first wiring layer and the second wiring layer, respectively, and having a temperature-dependent electrical resistance; a light-absorbing layer facing the surface of the substrate; and a separation layer arranged between the light-absorbing layer and the first wiring layer and the second wiring layer, respectively. The light-absorbing layer includes: a first region that extends to the opposite side of the second wiring layer relative to the first wiring layer when viewed from the thickness direction of the substrate; and a second region extending to the opposite side of the first wiring layer relative to the second wiring layer when viewed from the thickness direction of the substrate.
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Inventors:
YAMAZAKI MASAHIRO (JP)
SHIBAYAMA KATSUMI (JP)
KITAURA RYUSUKE (JP)
SHIBAYAMA KATSUMI (JP)
KITAURA RYUSUKE (JP)
Application Number:
PCT/JP2017/043174
Publication Date:
June 21, 2018
Filing Date:
November 30, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J1/02; H01L27/144; H01L27/146; H01L31/0248
Foreign References:
JP2004151059A | 2004-05-27 | |||
JP2002214035A | 2002-07-31 | |||
JP2001272271A | 2001-10-05 | |||
JP2003294523A | 2003-10-15 | |||
JP2014190894A | 2014-10-06 | |||
US20120132804A1 | 2012-05-31 |
Other References:
See also references of EP 3557203A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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