Title:
LIGHT DIFFRACTION ELEMENT UNIT, MULTISTAGE LIGHT DIFFRACTION DEVICE, AND MANUFACTURING METHOD FOR MULTISTAGE LIGHT DIFFRACTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/097347
Kind Code:
A1
Abstract:
Provided is a light diffraction element unit such that it is possible to make adjustments in the in-plane direction and define the interval between light diffraction element units that are adjacent in the layering direction. A light diffraction element unit (11i) comprises: a substrate (11ai); a light diffraction element (11c1); and a three-dimensional alignment mark (alignment mark 11b1) that is provided in the vicinity of the light diffraction element (11c1) and that has a thickness greater than that of the light diffraction element (11c1).
Inventors:
YAMAGISHI HIROYUKI (JP)
Application Number:
PCT/JP2021/030182
Publication Date:
May 12, 2022
Filing Date:
August 18, 2021
Export Citation:
Assignee:
FUJIKURA LTD (JP)
International Classes:
G02B5/18; G02B7/00; G06E3/00
Domestic Patent References:
| WO2019115606A1 | 2019-06-20 |
Foreign References:
| JP2000131508A | 2000-05-12 | |||
| JP2002372658A | 2002-12-26 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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