Title:
LIGHT-EMITTING DIODE DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/118027
Kind Code:
A1
Abstract:
A light-emitting diode display substrate and a manufacturing method therefor, and a display apparatus. The manufacturing method comprises: sequentially forming a planarization layer (9) and a photoresist layer (10) above a substrate (1) on which a thin-film transistor is formed, wherein the light sensitivity of the planarization layer (9) is higher than that of the photoresist layer (10); etching the planarization layer (9) and the photoresist layer (10) simultaneously, so as to form a pixel definition pattern (10a) by means of a removed portion of the photoresist layer (10), and forming an anode via hole pattern (9a) at a position, corresponding to the pixel definition pattern (10a), of the planarization layer (9), the anode via hole pattern being located above a source electrode (6) of the thin-film transistor to expose at least a portion of the source electrode (6) of the thin-film transistor; forming an anode pattern layer on the substrate on which the steps are completed, the anode pattern layer comprising a plurality of anodes (11), and the anodes (11) being formed on the anode via hole pattern (9a) and connected to the source electrode (6); and post-baking the developed planarization layer (9), so that a planarization layer material located at an edge of the anode via hole pattern (9a) covers edges of the anodes (11). The manufacturing method can reduce process steps and reduce production costs.
Inventors:
FANG JINGANG (CN)
SONG YOUNGSUK (CN)
SUN HONGDA (CN)
LI WEI (CN)
SONG YOUNGSUK (CN)
SUN HONGDA (CN)
LI WEI (CN)
Application Number:
PCT/CN2016/095502
Publication Date:
July 13, 2017
Filing Date:
August 16, 2016
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L51/56; H01L27/32; H01L51/52
Foreign References:
| CN105449127A | 2016-03-30 | |||
| CN1423513A | 2003-06-11 | |||
| CN101814522A | 2010-08-25 | |||
| CN104576705A | 2015-04-29 | |||
| US20010026125A1 | 2001-10-04 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
Download PDF: