Title:
LIGHT FILTERING DEVICE, OPTICAL MICROSCOPE, AND DEFECT OBSERVATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/192017
Kind Code:
A1
Abstract:
The present invention is a light filtering device comprising a shutter (212) that has an axis part and has an openable/closable configuration, and a substrate (201) that has a shutter opening part (264), the light filtering device having a configuration wherein voltage is applied between the shutter (212) and the substrate (201), the shutter (212) rotates around the axis part and moves to the shutter opening part (264) and thus is brought into a opening state, and the opening angle (280) of the shutter is adjusted to less than 90 degrees. Accordingly, fatigue fracture of the shutter of the light filtering device to be used for an optical microscope, which is a component of a defect observation apparatus, is prevented, and the life of a shutter array device can be prolonged.
Inventors:
YOSHIMURA YASUHIRO (JP)
AONO TAKANORI (JP)
OTANI YUKO (JP)
TAKADA SATOSHI (JP)
AONO TAKANORI (JP)
OTANI YUKO (JP)
TAKADA SATOSHI (JP)
Application Number:
PCT/JP2020/012940
Publication Date:
September 30, 2021
Filing Date:
March 24, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G02B26/02; B81B3/00; G01N21/956; G02B21/00; H01L21/66
Foreign References:
| JPH1039239A | 1998-02-13 | |||
| JPS62289807A | 1987-12-16 | |||
| KR20060046844A | 2006-05-18 | |||
| JP2014010371A | 2014-01-20 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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