Title:
LIGHT IMPRINTING METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/020741
Kind Code:
A1
Abstract:
Provided is a method of light imprinting that helps prevent fine pattern molding defects and exposure irregularities from occurring during light imprinting work. The present invention comprises lowering a die pressing mechanism that releasably holds a die formed with a fine pattern, pressing the fine pattern of the die onto a resist coated on a transcription object that is supported on an upper surface of a transcription object supporting platform, releasing the die from the die pressing mechanism after tightly pressing the die onto the transcription object, raising the die pressing mechanism from an upper surface of a die/transcription object stack after releasing the die, positioning an ultra-violet light source to irradiate ultra-violet light onto the upper surface of the die/transcription object stack after raising the die pressing mechanism, curing the resist, withdrawing the die/transcription object stack from the ultra-violet light source after curing the resist, lowering the die pressing mechanism to once again hold the die of the die/transcription object stack after withdrawing the die/transcription object stack, and thereafter raising the die pressing mechanism to peel the die from the transcription object.
Inventors:
YAMASHITA Naoaki (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
山下 尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
ISHII Shinjiro (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
石井 慎次郎 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
山下 尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
ISHII Shinjiro (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
石井 慎次郎 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
Application Number:
JP2011/068093
Publication Date:
February 16, 2012
Filing Date:
August 08, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMASHITA Naoaki (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
山下 尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
ISHII Shinjiro (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMASHITA Naoaki (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
山下 尚晃 (〒95 埼玉県児玉郡上里町嘉美１６００番地 Saitama, 〒3690395, JP)
ISHII Shinjiro (1600 Kami, Kamisato-machi Kodama-gu, Saitama 95, 〒3690395, JP)
International Classes:
H01L21/027; B29C59/02
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
Claims:
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