Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/187242
Kind Code:
A1
Abstract:
Provided is a light irradiation device which enables more efficient cooling of an excimer lamp. The present invention comprises a light emitting tube that extends in a first direction and that has transmissivity with respect to ultraviolet light, and a pair of electrodes that are opposite each other with the wall surfaces of the light emitting tube therebetween, and comprises: an excimer lamp that has, as a light emission surface, one wall surface among the wall surfaces of the light emitting tube which are opposite each other in a second direction; a pair of side wall plates that extend in the first direction and that, in a third direction, are opposite each other with the light emitting tube therebetween; a blower mechanism that has a jet opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and one of the side wall plates, and which jets cooling gas toward the outer wall surface of the light emitting tube on the opposite side from the light emission surface; a suction mechanism that has a suction opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and the side wall plate on the opposite side from the blower mechanism; and a divider plate that extends in the first direction, that in the second direction is disposed on the opposite side from the light emission surface of the light emitting tube and away from the light emitting tube, and that directly or indirectly connects the pair of side wall plates.
Inventors:
OZU MASATO (JP)
TAKEZOE NORITAKA (JP)
ARIKAWA KAZUKI (JP)
YAMAGUCHI MASASHI (JP)
TAKEZOE NORITAKA (JP)
ARIKAWA KAZUKI (JP)
YAMAGUCHI MASASHI (JP)
Application Number:
PCT/JP2021/009312
Publication Date:
September 23, 2021
Filing Date:
March 09, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/00; H01L21/304
Foreign References:
| JP2015230838A | 2015-12-21 | |||
| JP2012221621A | 2012-11-12 | |||
| JP2017157458A | 2017-09-07 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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