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Title:
LIGHT MEASURING DEVICE AND LIGHT MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/079786
Kind Code:
A1
Abstract:
Reflection-type Coherent anti-Stokes Ramen scattering (CARS) is preferable for surface state measurement due to its signal strength, but it is difficult to identify a surface position because the topographical information is not obtained. The reflection-type CARS microscopy and a high resolution phase sensor are combined. The phase sensor identifies the surface position, and reflected CARS derived from the surface is detected to perform compositional analysis.

Inventors:
SHIOZAWA MANABU (JP)
WATANABE KOICHI (JP)
SHIRAI MASATAKA (JP)
OSAWA KENTARO (JP)
Application Number:
PCT/JP2014/075038
Publication Date:
June 04, 2015
Filing Date:
September 22, 2014
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/65
Domestic Patent References:
WO2013129412A12013-09-06
WO2013047698A12013-04-04
WO2014061147A12014-04-24
Foreign References:
JP2008253493A2008-10-23
JP2013182653A2013-09-12
JP2012521001A2012-09-10
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
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