Title:
LIGHT-MODIFYING DEVICE AND LIGHT-MODIFYING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/180978
Kind Code:
A1
Abstract:
Provided is a light-modifying device and a light-modifying method capable of forming a thick surface-modifying layer at a low cost and with a simple configuration. This light-processing device comprises: a processing chamber in which the surface of a workpiece is modified; an ultraviolet light source for irradiating the workpiece in the processing chamber with ultraviolet light having a main emitted light wavelength that is within a wavelength range of no more than 243 nm; and at least one heater for heating the workpiece in the processing chamber to a temperature higher than the room temperature outside the processing chamber. In this light-modifying method, a workpiece is conveyed into a processing chamber, the workpiece, which is at a temperature higher than the room temperature outside the processing chamber, is irradiated with ultraviolet light having a main emitted light wavelength that is in a wavelength range of no more than 243 nm, and the surface of the workpiece is thereby modified.
Inventors:
SHIMIZU AKIHIRO (JP)
YAMAMORI KENJI (JP)
YAMAMORI KENJI (JP)
Application Number:
PCT/JP2021/044257
Publication Date:
September 01, 2022
Filing Date:
December 02, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
C08J7/00; C08J7/046; B01J19/12; B05D3/00; B05D3/02; B05D3/06
Domestic Patent References:
| WO2012077553A1 | 2012-06-14 | |||
| WO2012014653A1 | 2012-02-02 | |||
| WO2013172359A1 | 2013-11-21 | |||
| WO2008078516A1 | 2008-07-03 |
Foreign References:
| JP2005070243A | 2005-03-17 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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