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Title:
LIGHT REFLECTION MECHANISM, OPTICAL INTERFEROMETER AND SPECTRAL ANALYZER
Document Type and Number:
WIPO Patent Application WO/2010/122879
Kind Code:
A1
Abstract:
Provided is an inexpensive, high performance, compact, and energy saving light reflection mechanism comprising a first moving portion having a reflecting surface on the front surface, a supporting portion which supports the first moving portion, a first beam and a translating beam which couple the first moving portion and the supporting portion in the form of cantilever beam above and below the supporting portion, and a drive portion which moves the first moving portion, wherein a large amplitude can be obtained by small energy when the first moving portion is forced into resonance vibration in the direction perpendicular to the first reflecting surface. Also provided is an optical interferometer and a spectral analyzer.

Inventors:
MATSUDA SHINYA (JP)
HIROSE SATORU (JP)
Application Number:
JP2010/055677
Publication Date:
October 28, 2010
Filing Date:
March 30, 2010
Export Citation:
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Assignee:
KONICA MINOLTA HOLDINGS INC (?1000005, JP)
MATSUDA SHINYA (JP)
HIROSE SATORU (JP)
International Classes:
G02B26/02; G01B9/02; G01J3/45; G01J9/02; G01M11/02; G02B5/08
Domestic Patent References:
WO2006000120A12006-01-05
Foreign References:
US20040027225A12004-02-12
JP2004309643A2004-11-04
JP2005148027A2005-06-09
JP2008309706A2008-12-25
JPH11231230A1999-08-27
JP2004212670A2004-07-29
JP2001305440A2001-10-31
JP2008503732A2008-02-07
JP2004212670A2004-07-29
JP2009050577A2009-03-12
Other References:
See also references of EP 2423729A4
DAISUKE INOUE, FUMIKAZU OHIRA, A STUDY OF MEMS MIRROR FOR SPECTRAL SENSING, 27 May 2008 (2008-05-27), Retrieved from the Internet
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