LIGHT SENSOR, LIGHT DETECTION DEVICE, AND TERAHERTZ/INFRARED FOURIER SPECTROSCOPE - NATIONAL UNIV CORPORATION TOKYO UNIV OF AGRICULTURE AND TECHNOLOGY

Title:

LIGHT SENSOR, LIGHT DETECTION DEVICE, AND TERAHERTZ/INFRARED FOURIER SPECTROSCOPE

Document Type and Number:

WIPO Patent Application WO/2023/233900

Kind Code:

A1

Abstract:

This light sensor comprises: a vibration input unit that generates vibrations on the basis of an input signal; a vibration unit that is formed using a MEMS structure using a silicon material, that vibrates on the basis of vibrations transmitted by the vibration input unit, and that includes a both-end supported beam the resonant frequency of which changes due to the input of light; and a vibration detection unit that detects the vibrations of the both-end supported beam.

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Inventors:

ZHANG YA (JP)
EBATA KAZUKI (JP)
IIMORI MIRAI (JP)

Application Number:

PCT/JP2023/016930

Publication Date:

December 07, 2023

Filing Date:

April 28, 2023

Export Citation:

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Assignee:

NATIONAL UNIV CORPORATION TOKYO UNIV OF AGRICULTURE AND TECHNOLOGY (JP)

International Classes:

G01J1/02; G01J3/02; G01J3/45

Foreign References:

JPH0783756A	1995-03-31
JP2018146294A	2018-09-20
CN112710402A	2021-04-27
JP2007527508A	2007-09-27
JPH10281862A	1998-10-23
US20160065169A1	2016-03-03
US20140353506A1	2014-12-04

Attorney, Agent or Firm:

TAZAKI Akira et al. (JP)

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