LIGHT SOURCE APPARATUS AND SURFACE PROCESSING METHOD

Title:

LIGHT SOURCE APPARATUS AND SURFACE PROCESSING METHOD

Document Type and Number:

WIPO Patent Application WO/2011/046077

Kind Code:

A1

Abstract:

Provided is a light source apparatus that has a long lifespan as a light source, and wherein the luminescence intensity of vacuum-ultraviolet light is improved, as well as a surface processing method that uses the light source apparatus, and has excellent surface processing efficiency. This light source device, which supplies inert gas into a discharge space under atmospheric pressure or pressure in the vicinity thereof, and irradiates light emitted from plasma generated by forming a high frequency electric field in the discharge space, is characterized in that the inert gas contains carbonic acid gas, and that the frequency of the high frequency electric field to be formed is the microwave band.

Inventors:

FUKUDA Kazuhiro (Inc. 1, Sakura-machi, Hino-sh, Tokyo 11, 〒1918511, JP)
福田　和浩 (〒11 東京都日野市さくら町１番地コニカミノルタテクノロジーセンター株式会社内 Tokyo, 〒1918511, JP)
SUZUKI Masanobu (Inc. 1, Sakura-machi, Hino-sh, Tokyo 11, 〒1918511, JP)
鈴木　正信 (〒11 東京都日野市さくら町１番地コニカミノルタテクノロジーセンター株式会社内 Tokyo, 〒1918511, JP)

Application Number:

JP2010/067740

Publication Date:

April 21, 2011

Filing Date:

October 08, 2010

Export Citation:

Click for automatic bibliography generation Help

Assignee:

Konica Minolta Holdings, Inc. (6-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 05, 〒1000005, JP)
コニカミノルタホールディングス株式会社 (〒05 東京都千代田区丸の内一丁目６番１号 Tokyo, 〒1000005, JP)
FUKUDA Kazuhiro (Inc. 1, Sakura-machi, Hino-sh, Tokyo 11, 〒1918511, JP)
福田　和浩 (〒11 東京都日野市さくら町１番地コニカミノルタテクノロジーセンター株式会社内 Tokyo, 〒1918511, JP)
SUZUKI Masanobu (Inc. 1, Sakura-machi, Hino-sh, Tokyo 11, 〒1918511, JP)

International Classes:

H01J65/04; B08B7/00; H05H1/24

Download PDF:

View/Download PDF PDF Help

Previous Patent: ELECTRICALLY CONDUCTIVE PASTE, ELECTRICALLY CONDUCTIVE FILM, TOUCH PANEL, AND PROCESS FOR PRODUCTION...

Next Patent: NON-DESTRUCTIVE EXAMINATION METHOD AND DEVICE