Title:
LIGHT SOURCE DEVICE, EXPOSURE APPARATUS, AND DETERMINATION METHOD FOR LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/054250
Kind Code:
A1
Abstract:
The present invention provides a light source device provided with a determination circuit for distinguishing whether a discharge lamp serving as a light source in an exposure apparatus used to expose a printed circuit board or the like is a genuine one or not, and a brand-new one or a used one with high accuracy, in a short time and at low cost. A light source device (100) comprises a discharge lamp (110) serving as a light source, a determination circuit (200), and a reflector container (151) to which the discharge lamp (110) and the determination circuit (200) are mounted. The determination circuit (200) comprises an RC parallel circuit (210) for detecting whether the discharge lamp (110) is a genuine one, and a fuse (220) connected in series with the RC parallel circuit (210) in order to determine whether the discharge lamp (110) is a brand-new one.
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Inventors:
IKEDA TOMIHIKO (JP)
GOUDA TETSUYA (JP)
ODANI KOUICHI (JP)
GOUDA TETSUYA (JP)
ODANI KOUICHI (JP)
Application Number:
PCT/JP2018/032883
Publication Date:
March 21, 2019
Filing Date:
September 05, 2018
Export Citation:
Assignee:
PHOENIX ELECTRIC CO LTD (JP)
International Classes:
H05B37/02; G03F7/20
Foreign References:
| JP2016200751A | 2016-12-01 | |||
| JP2007042533A | 2007-02-15 | |||
| JP2009251246A | 2009-10-29 | |||
| JP2015103882A | 2015-06-04 |
Attorney, Agent or Firm:
TADA Yuji (JP)
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