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Title:
LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING LIGHT SOURCE MODULE UNIT
Document Type and Number:
WIPO Patent Application WO/2017/034221
Kind Code:
A1
Abstract:
The present invention provides an integrated light source module unit for exposure and an exposure device having the light source module unit, which can ensure exposure performance capable of dramatically improving the microfabrication and the resolution of exposure patterns and, at the same time, has been improved so as to be economically substitutable for the light source of a conventional exposure device since low power consumption and, particularly, ultraviolet (UV) lights having a high-efficiency and high-output single wavelength and short wavelength are ensured by maximizing light output power by a combination of modules each comprising: a center light source part comprising a light source panel formed by mounting a plurality of unit UV light emitting diodes (LEDs) on a circuit board in a matrix array structure, and an optical panel formed by providing a plurality of unit condensing lenses on the optical panels, which are arranged at light-emitting sides of the LEDs to face the light source panel, in a matrix array structure in a state in which the condensing lenses are eccentric toward a random reference center axial line, which passes the center of a UV LED array on the light source panel, with respect to a major optical axis at the positions respectively corresponding to the LEDs; and a plurality of peripheral light source parts radially and equally arranged in an inclined state so as to face a major light-emitting axis of the unit UV LED of the center light source part.

Inventors:
CHO, Nam Jik (503 95-10, Oseong-ro Seobuk-gu,Cheonan-si, Chungcheongnam-do, 31106, KR)
IN, Chi Eok (103-1703, 74-11 Geosan3geori-gil, Sinpyeong-myeon,Dangjin-si, Chungnam, 31748, KR)
PARK, Jong Won (105-1101, 20 Pyeonghwa 19-gil, Wansan-gu,Jeonju-si, Jeollabuk-do, 55121, KR)
SONG, Woo Ree (103-801, 999-7 Cheonan-daero, Seobuk-gu,Cheonan-si, Chungcheongnam-do, 31114, KR)
JUNG, Hae Il (107-1404, 24 Imok-ro, Jangan-gu,Suwon-si, Gyeonggi-do, 16336, KR)
Application Number:
KR2016/009139
Publication Date:
March 02, 2017
Filing Date:
August 19, 2016
Export Citation:
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Assignee:
CHO, Nam Jik (503 95-10, Oseong-ro Seobuk-gu,Cheonan-si, Chungcheongnam-do, 31106, KR)
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
WO2007108504A12007-09-27
Foreign References:
KR20110004276A2011-01-13
KR20140055605A2014-05-09
JP2011134932A2011-07-07
KR20150049563A2015-05-08
Attorney, Agent or Firm:
NEIT INTERNATIONAL PATENT LAW FIRM (4F 16, Teheran-ro 6-gilGangnam-gu, Seoul, 06233, KR)
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