Title:
LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2017/135683
Kind Code:
A1
Abstract:
The present invention provides a light source module unit for exposure. The light source module unit for exposure according to the present invention comprises: a light source panel having multiple ultraviolet light-emitting elements configured in an array structure; and an optical panel having multiple unit light-collecting lenses configured on a lens panel, which is arranged near light emission parts of the light-emitting elements, and positioned to correspond to the unit light-emitting elements, respectively, in a matrix-type array structure such that, with regard to a main optical axis, the unit light-collecting lenses are eccentric toward a predetermined reference center axis that extends through the center of the ultraviolet light-emitting element array, wherein each unit light-collecting lens has a light incident surface formed in the shape of one selected from a flat surface, a concave surface having a curvature (R) of (-) 0.15 or less, and a convex surface having a curvature (R) of (+) 0.15 or less, and has a light emission surface formed as a convex lens, and the distance (C1) of spacing between the ultraviolet light-emitting elements and the unit light-collecting lenses is arranged to satisfy, with regard to the diameter (d) of the light-collecting lenses, the value of 0.15＜C1/d＜0.5. The above configuration is advantageous in that diffused light emitted from each unit ultraviolet light-emitting element is effectively collected in the light-receiving area of the exposure device, making it possible to maximize the amount of light with lower power consumption; particularly, ultraviolet light having a single short wavelength and having high efficiency and high output is implemented, thereby securing an exposure performance that can make the exposure pattern smaller and can substantially improve the resolution; and the light source of an existing exposure device can be replaced in a practical and economical manner.
Inventors:
CHO NAM JIK (KR)
IN CHI EOK (KR)
PARK JONG WON (KR)
SONG WOO REE (KR)
JUNG HAE IL (KR)
IN CHI EOK (KR)
PARK JONG WON (KR)
SONG WOO REE (KR)
JUNG HAE IL (KR)
Application Number:
PCT/KR2017/001095
Publication Date:
August 10, 2017
Filing Date:
February 02, 2017
Export Citation:
Assignee:
CHO NAM JIK (KR)
International Classes:
G03F7/20; F21K9/60; F21V5/04; F21V8/00; F21V29/70
Foreign References:
| KR20120082805A | 2012-07-24 | |||
| KR20150093200A | 2015-08-17 | |||
| KR20150121530A | 2015-10-29 | |||
| JP2011075742A | 2011-04-14 | |||
| KR20110066270A | 2011-06-17 |
Attorney, Agent or Firm:
NEIT INTERNATIONAL PATENT LAW FIRM (KR)
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