Title:
LIGHT SOURCE, SPECTROSCOPIC ANALYSIS SYSTEM, AND SPECTROSCOPIC ANALYSIS METHOD
Document Type and Number:
WIPO Patent Application WO/2021/193295
Kind Code:
A1
Abstract:
A light source that includes a light-emitting diode (51X), a wavelength conversion unit (52X) configured to convert the wavelength of light outputted from the light-emitting diode (51X), and a light-condensing unit (54X) configured to condense light outputted from the wavelength conversion unit (52X). A light source that has a mixing unit configured to mix light outputted from a plurality of light-emitting elements of light of different wavelengths. A spectroscopic analysis system that includes a spectrometry unit configured to split light emitted from the light source and reflected from an object and thereby acquire spectroscopic data.
Inventors:
UMEHARA YASUTOSHI (JP)
Application Number:
PCT/JP2021/010880
Publication Date:
September 30, 2021
Filing Date:
March 17, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L33/50; G01B11/06; G01J3/10; G01N21/956; H01L33/00; H01L33/58
Domestic Patent References:
| WO2014065292A1 | 2014-05-01 |
Foreign References:
| JP2004327361A | 2004-11-18 | |||
| JPH11317108A | 1999-11-16 | |||
| JP2013183078A | 2013-09-12 | |||
| JP2010107316A | 2010-05-13 | |||
| US20110025951A1 | 2011-02-03 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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