Title:
LIGHT SOURCE UNIT FOR ALIGNMENT, ALIGNMENT APPARATUS, EXPOSURE APPARATUS, DIGITAL EXPOSURE APPARATUS, ALIGNMENT METHOD, EXPOSURE METHOD AND METHOD FOR SETTING LIGHTING APPARATUS CONDITION
Document Type and Number:
WIPO Patent Application WO/2006/095605
Kind Code:
A1
Abstract:
A light source unit (100A) for alignment is provided with a camera (30), a lighting apparatus (102), and furthermore, a changing section (110), an image processing section (112), an extracting section (114) and a setting section (116). The changing section (110) controls drive of a shifting mechanism (118) based on information from the setting section (116), and the lighting apparatus (102) is shifted to a desired position. The image processing section (112) acquires a quantitative data relating to an alignment mark (50) and contrast of its peripheral part (104), based on image pickup information from the camera (30). The extracting section (114) extracts an interval wherein the contrast is optimized as an optimum interval, based on the quantitative data. The setting section (116) gives information to the changing section (110) so that the interval between the lighting apparatus (102) and the alignment mark (50) is the optimum interval.
Inventors:
UEMURA HIROSHI (JP)
KATAYAMA TORU (JP)
KATAYAMA TORU (JP)
Application Number:
PCT/JP2006/303795
Publication Date:
September 14, 2006
Filing Date:
February 28, 2006
Export Citation:
Assignee:
FUJI PHOTO FILM CO LTD (JP)
UEMURA HIROSHI (JP)
KATAYAMA TORU (JP)
UEMURA HIROSHI (JP)
KATAYAMA TORU (JP)
International Classes:
G03F9/00; H01L21/027
Foreign References:
| JP2003337425A | 2003-11-28 | |||
| JP2005189365A | 2005-07-14 | |||
| JP2001274550A | 2001-10-05 | |||
| JPH067006U | 1994-01-28 | |||
| JPH1022221A | 1998-01-23 | |||
| JPH05343296A | 1993-12-24 | |||
| JP2002170757A | 2002-06-14 | |||
| JPS61112122A | 1986-05-30 |
Attorney, Agent or Firm:
Chiba, Yoshihiro (1-1 Yoyogi 2-chome, Shibuya-k, Tokyo 53, JP)
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